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5mm Effective area: Central square of 3 x 3mm Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating
6 Cantilever Geometry: Rectangular & Triangular Cantilevers Number: 6
On some CD calibration targets one of the 100nm lines can be missing
Cantilever Geometry: Special Cantilevers Number: 1
SAPPHIRE-12M Aperture 5mm Effective area: Central squareSapphire Sample, 12mm Mounted DESCRIPTION Sapphire sample for PeakForce QNM. Sapphire disk pre mounted on a 12mm magnetic sample disk. Recommended for use when calibrating deflection sensitivity, especially for spring constants >100 N m.
